MKS 902-1112 Piezo Transducer

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The MKS 902-1112 Piezo Transducer is an industrial‑grade absolute pressure sensor that leverages advanced piezoelectric MEMS technology to provide highly accurate pressure measurements over a wide vacuum range. Designed and manufactured by MKS Instruments, the 902 series transducers integrate a robust piezo sensor element with precision electronics into a compact, rugged housing. Offering a resolution of 0.01% of full scale and an accuracy rating of +/- 0.05% F.S., the MKS 902-1112 Piezo Transducer delivers unparalleled precision, making it an indispensable tool for researchers, engineers, and technicians seeking unparalleled measurement reliability. Its IP67 environmental rating ensures protection against dust ingress and water exposure, guaranteeing optimal performance even in challenging conditions.Specifically, the 902-1112 model offers excellent performance for applications requiring absolute pressure feedback, such as semiconductor vacuum systems, thin film deposition, analytical instruments, and industrial process controls.

Model: 902-1112
Measurement Type: Absolute pressure transducer (piezoelectric MEMS sensor)
Full Scale Pressure: 1,000 Torr (Full Scale)
Accuracy: ±1 % of reading at mid and high ranges (specified per datasheet style)
Overpressure Limit: ~150 psia (≈1,000 Torr)
Burst Pressure: ~1,000 psia (extremely rugged design)
Analog Output: 0 – 10 VDC (linear)
Power Requirement: Approx. 13 – 32 VDC supply
Connector: 15‑pin high‑density D‑sub interface
Surface Finish: < 5 μin Ra
Operating Temperature: 0 – 50 °C (32 – 122 °F)
Internal Volume: 0.21 in.3 (3.4 cm3)
Materials Exposed to Vacuum: 304, 316 Stainless Steel

• Gas‑Independent Absolute Pressure Measurement – Uses advanced piezoelectric sensor technology to measure absolute pressure that is independent of gas type, giving more reliable readings across mixed‑gas environments.
  
• Wide Range Vacuum Capability – Offers accurate pressure sensing from near vacuum up to 1,000 Torr full scale, suitable for vacuum systems in semiconductor fabrication and thin film processes.
• Robust Wetted Materials – Incorporates Incoloy wetted surfaces to resist corrosion and enable compatibility with aggressive gas chemistries found in industrial vacuum applications.
• High Overpressure & Burst Tolerance – Designed to withstand substantial overpressure conditions and mechanical stresses, giving long‑term reliability in demanding process systems.
• Compact and Rugged Construction – With a compact body and durable build, the 902-1112 is easy to integrate into existing vacuum chambers, process tools, or OEM instrumentation packages.

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